Methods for their preparation and the organic EL device using the protective film and the DLC protective film

摘要

PROBLEM TO BE SOLVED: To provide an organic EL element having sufficient adhesion and fineness of a film and a protective film with a thin film thickness formed in it. ;SOLUTION: In this organic EL element, an anode 2, an organic EL element layer 3 and a cathode 4 are laminated in this order on a glass substrate 1, and a DLC protective film 5 is formed on the glass board so as to cover them. The DLC protective film is structured by laminating a backing film 6 of amorphous silicon and at least two or more layers of DLC, and among the laminated layers, a first protective carbon film 7 adhering to the backing film formed on the glass board is formed by a CVD method or a spattering method under the condition having a partial hydrogen pressure of about 20% in which internal stress gets small, and a second carbon film 8 laminated on its top is formed by the CVD method or the spattering method under the condition in which hydrogen growing its density is not practically contained.;COPYRIGHT: (C)2000,JPO