Excitation unit, linear or planar motor using the same, stage device using the excitation unit, and exposure apparatus using the stage

摘要

The present invention relates to a planar motor capable of moving two dimensionally on a flat plane, and provides a planar motor capable of controlling a position and a posture of a movable element at six degrees of freedom, while having a high thrust, allowing the movable member to move a two dimensional plane while having a floating force Purpose. A movable element 4 having a plurality of permanent magnets 50N and 50s having a plurality of permanent magnets 50N and 50s alternately arranged in a matrix form on the X-Y plane by reversing the direction of the magnetic poles, four arm portions 20 to 26 in the whole X-Y direction, and a plurality of permanent magnets 50N, 50s of the magnetic pole unit A planar motor having an iron core having a pair of projections 28 to 36 formed at the proximal end of each arm portion 20 to 26 and a proximal end of each arm portion connected to each arm portion, and an excitation unit 6 having four thrusters 38 to 44 wound on each arm portion 20 to 26, respectively "Ta".