EXPOSURE SYSTEM AND METHOD OF DISTRIBUTING ERROR FOR PROCESSING ON ITS PATTERN ON OCCURRENCE OF ERROR

摘要

PROBLEM TO BE SOLVED: To provide an exposure system which executes accurate processing and is enhanced in operating efficiency by distributing errors for processing, depending on their patterns on the occurrence of errors, and to provide a method of distributing errors for processing on the occurrence of errors. ;SOLUTION: An exposure system is equipped with an error storage 106 which serves as a storage means to store errors and a distributing means (a main processing section 102, a processing table 103, a processing judgement section 104, and a unit section 105) which distributes errors for processing, depending on their patterns when errors occur in an exposure system in operation.;COPYRIGHT: (C)2001,JPO