MOVING BODY GUIDING APPARATUS, METHOD FOR GUIDING MOVING BODY AND ALIGNER USING IT

摘要

PROBLEM TO BE SOLVED: To prevent failures due to changes of control characteristics and carrying or the like by making the height low, keeping the attitude accuracy high, and not making the clearance of bearings change even if the temperature changes. ;SOLUTION: This apparatus comprises a surface plate 1 on which a Y direction driver 42 as a first moving body and an X direction driver 43 as a second moving body are guided in the vertical direction and two fixed guides 21, 22 which are fixed on the surface plate 1 and along which the X direction driver 41 and the Y direction driver 42 are respectively guided in the transverse direction. The X direction driver 41 and the Y direction driver 42 are respectively driven by linear motors 511, 512 and linear motors 521, 522 that are actuators deployed on the surface plate 1, and an XY moving body 3 as a third moving body is guided in the vertical direction on a surface plate 1a. The XY moving body 3 moves in mutually perpendicularly two directions by being guided along the side faces of the X direction driver 41 and the Y direction driver 42.;COPYRIGHT: (C)2001,JPO