Air conditioning system null for clean room

摘要

PURPOSE: To supply clean air of high quality by eliminating rescattering and re-elusion of components from a filter body to remove metal and gas components as well as dust components in the air concerning an air conditioning system for a clean room to be provided for a semiconductor factory or the like, to be more specific, concerning an air conditioning apparatus having air cleaning action. ;CONSTITUTION: An air conditioning apparatus 8 is provided with an air cleaning chamber 9 which has an air intake port 10 formed on one side thereof and an air discharge port 11 made to communicate with a feed air duct 7 formed on the other side thereof and a spray nozzle 15 which is arranged in the air cleaning chamber 9 to jet out pure water.;COPYRIGHT: (C)1994,JPO&Japio