Bear tip/chip supply discharge device null of bear tip/chip inspection

摘要

PURPOSE: To select various kinds of lot delivery in accordance with a chip manufacturing process. ;CONSTITUTION: This is a bare chip supply and discharge device 2 of a bare chip inspection machinery 1 to carry out supply and discharge of a bare chip between itself and a bare chip passage inspection device 4, and it is furnished with two systems of pallet feeders 17, a pallet 26 for a rejected article, a spare pallet 27 and an XY robot 18 to supply and discharge the bare chip and has three kinds of driving modes. The first mode moves the bare chip from one of the pallet feeders 17 to the other pallet feeder 17 while carrying out passage inspection, and when the rejected article is found, it is replenished with a new one from the spare pallet 27. The second mode returns a passage inspected bare chip to the same pallet feeder 17, and a position where the rejected article is found is left in a cavant state. The third mode returns the passage inspected bare chip to the original pallet feeder 17, and when a rejected article is found, it is replenished with a new one from the spare pallet 27.;COPYRIGHT: (C)1996,JPO