Aspheric surface form measuring method and device aspheric surface evaluation method

摘要

PURPOSE: To make it possible to measure the cross-sectional shape of the entier body accurately by connecting the shape data in a plurality of scanning regions obtained by a shape reading means with each other, and synthesizing the data into a cross-sectional shape of the entire body. ;CONSTITUTION: A mark M is formed at the aspherical surface part of an object to be inspected. The aspherical surface of a lens O is divided into two scanning regions A and B, wherein the neighboring parts of the mark M are overlapped. The lens O is set on a gonio-stage and rotated around an axis, which orthogonaly intersects the scanning direction. When a slant angle is imparted and the shapes of the scanning ranges A and B are read, two shape data DA and DB are obtained in correspondence with the shapes of the scanning ranges A and B. In a control/operation device, which is a data processing means, these two shape data DA and DB uodergo data processing in accordance with a program, and the data are connected with the mark part as the common reference. Thus, the cross-sectional shape of the entire body is synthesized.;COPYRIGHT: (C)1996,JPO