Sulfonate esters of 2,4,6-tris- (2-hydroxyethoxy)-1,3,5 triazine, and positive-working radiation-sensitive mixtures and recording materials prepared with these esters

摘要

The invention relates to a 2,4,6-tris(2-hydroxyethoxy)- 1,3,5-triazine esterified by two or three (hetero)arylsulphonic acids and a radiation-sensitive positive-working material prepared therewith, which is distinguished by a high resolution and a high sensitivity over a wide spectral range. It also exhibits a high thermal stability and on exposure to light forms no corrosive photolysis products. The invention furthermore relates to a radiation-sensitive recording material prepared therefrom, which is suitable for the preparation of photoresists, electronic components, printing plates, or for etching moulded parts.