MEASUREMENT RESULT OR ANALYSIS RESULT PROJECTING DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To facilitate correspondence between a measurement result or an analysis result and a sample to an observer. ;SOLUTION: An image of a measurement result of a sample 1 measured by a measuring part 5 is supplied to a measurement result analyzing part 3. The measurement result analyzing part 3 supplies an image of an analysis result obtained resultantly to a projector for analysis result projection 6a. The projector for analysis result projection 6a projects the image of the analysis result on the sample 1.;COPYRIGHT: (C)2001,JPO