Confocal microscope for optical measurement of suffering observation volume

摘要

(57) Abstract The confocal microscope for optical detection of the suffering observation volume which includes with the illuminant and the dichroic mirror and object lens array (24) and the optical item array for observation which include the mechanical aperture. In order the dichroic mirror and with object lens array (24), to vibrate canonical position as a center, the deflection mirror array which possesses the object lens side plane surface deflection mirror (34) which is arrayed is laid out. The deflection mirror (34), the optical axis of the respective excited light which is reflected by the vibration of the object lens side mirror (34), is a field of the mechanical aperture of object lens array (24), as the vibrating axis (40) of intersection and the object lens side deflection mirror (34), the plane surface (44) which when in canonical position there is an object lens side deflection mirror (34), includes the object lens side deflection mirror (34) and, passes by the common intersection in the optical axis of the excited light which is reflected with the intersection which substantially is common verticality to the optical axis of reflected lightSo it agrees to the line segment which the plane surface (46) which is crosses.