Particle tracked simulation method and of using this the sputtering simulation method

摘要

PROBLEM TO BE SOLVED: To improve calculation accuracy in a particle orbit simulation method calculating the orbits of respective particles by analyzing the moving state of a system including the plural particles colliding against each other. SOLUTION: The orbits of the respective particles of the system including the plural particles are calculated by successively repeating the following steps (A) to (C) until the prescribed time is attained: (A) The step for determining the acceleration, speed and position at the time t with respect to the one or =2 particle systems participating in collision. (B) The step of calculating the time step ttmp at which the change rate of the two-body potential of the two- particle systems described above attains equal to a preset value. (C) The step of selecting the smallest ttmp among the ttmp calculated with respect to the respective two-particle systems participating in collision, determining this value as t and substituting the value of the t described above with the value of t+t.