LAYOUT PATTERN VERIFYING DEVICE, ITS METHOD, AND MEDIUM RECORDING ITS PROGRAM, LAYOUT PATTERN CORRECTING DEVICE, ITS METHOD AND MEDIUM RECORDING ITS PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a layout pattern verifying device capable of accurately recognizing and verifying a layout pattern.;SOLUTION: This layout pattern verifying device includes a search reference edge selection part 23 selecting an edge in the layout pattern, an in-scope edge search part 24 searching another edge within a specified range from the edge selected by the selection part 23, a relative angle filtering part 25 filtering the edge by a relative angle between the edge selected by the selection part 23 and the edge searched by the search part 24, and a flag output part 26 verifying the edge already filtered by the filtering part 25.;COPYRIGHT: (C)2001,JPO