METHOD FOR CLEANING SURFACE OF ARTICLE AND CLEANING DEVICE, METHOD FOR MANUFACTURING OPTIC ELEMENT USING METHOD FOR CLEANING SURFACE OF ARTICLE AND CLEANING DEVICE, AND OPTIC ELEMENT MANUFACTURING DEVICE, OPTICAL SYSTEM, ALIGNING METHOD AND ALIGNING DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for cleaning the surface of article by which it is possible to achieve a cleaning operation to obtain extremely satisfactory optical characteristics in the ultraviolet region with a compact cleaning device almost without the use of a cleaning fluid such as a solvent, even when a large aperture lens is cleaned, and also a cleaning device and an optic element manufacturing method, and device using the described method and device as well as an optical system, an aligning method/an aligning device, and a device manufacturing method. ;SOLUTION: The method for cleaning the surface of article includes, for example, a static electricity elimination process for eliminating static electricity from the surface of an article using an ionized gas and, for example, a pollutant eliminating process for eliminating a pollutant from the surface of the article by irradiating with a high-energy light within the range of an ability to maintain the crystal structure of a lens material and the like or the device for eliminating the surface of the article. Further, the optic element manufacturing method and device, the optical system, the aligning method and device, and the device manufacturing method are constituted of the described method or device.;COPYRIGHT: (C)2001,JPO