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ELECTRONIC ELEMENT, SURFACE ACOUSTIC WAVE ELEMENT, METHOD FOR MOUNTING THEM, MANUFACTURE OF ELECTRONIC PARTS OR SURFACE ACOUSTIC WAVE DEVICE, AND SURFACE ACOUSTIC WAVE DEVICE
ELECTRONIC ELEMENT, SURFACE ACOUSTIC WAVE ELEMENT, METHOD FOR MOUNTING THEM, MANUFACTURE OF ELECTRONIC PARTS OR SURFACE ACOUSTIC WAVE DEVICE, AND SURFACE ACOUSTIC WAVE DEVICE
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机译:电子元件,表面声波元件,它们的安装方法,电子零件或表面声波装置的制造以及表面声波装置
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摘要
PROBLEM TO BE SOLVED: To prevent the breakage, electrical disconnection, etc., of an electronic element by forming an intermediate electrode on an electrode pad and a base electrode containing such a metallic material that can deteriorate the orientational property of the intermediate electrode under the intermediate electrode. SOLUTION: An electrode pad 2 which is electrically connected to a comb-shaped electrode is formed on the surface of a piezoelectric substrate 1, namely, on the surface on which the comb-shaped electrode is formed. On the pad 2, an intermediate electrode 3 composed of Al is provided and a base electrode 4 composed of NiCr which is a metallic material that can deteriorate the orientational property of the electrode 3 is formed under the electrode 3. Then a bump electrode 6 composed of an Au component is provided on the intermediate electrode 3, and a package electrode 7 formed on a package container 8 is faced oppositely to the intermediate electrode 3 through the bump electrode 6 and connected to the electrode 3 by pressing the electrode 7 against the electrode 3 while an ultrasonic wave is emitted.
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