首页> 外国专利> ELECTRONIC ELEMENT, SURFACE ACOUSTIC WAVE ELEMENT, METHOD FOR MOUNTING THEM, MANUFACTURE OF ELECTRONIC PARTS OR SURFACE ACOUSTIC WAVE DEVICE, AND SURFACE ACOUSTIC WAVE DEVICE

ELECTRONIC ELEMENT, SURFACE ACOUSTIC WAVE ELEMENT, METHOD FOR MOUNTING THEM, MANUFACTURE OF ELECTRONIC PARTS OR SURFACE ACOUSTIC WAVE DEVICE, AND SURFACE ACOUSTIC WAVE DEVICE

机译:电子元件,表面声波元件,它们的安装方法,电子零件或表面声波装置的制造以及表面声波装置

摘要

PROBLEM TO BE SOLVED: To prevent the breakage, electrical disconnection, etc., of an electronic element by forming an intermediate electrode on an electrode pad and a base electrode containing such a metallic material that can deteriorate the orientational property of the intermediate electrode under the intermediate electrode. SOLUTION: An electrode pad 2 which is electrically connected to a comb-shaped electrode is formed on the surface of a piezoelectric substrate 1, namely, on the surface on which the comb-shaped electrode is formed. On the pad 2, an intermediate electrode 3 composed of Al is provided and a base electrode 4 composed of NiCr which is a metallic material that can deteriorate the orientational property of the electrode 3 is formed under the electrode 3. Then a bump electrode 6 composed of an Au component is provided on the intermediate electrode 3, and a package electrode 7 formed on a package container 8 is faced oppositely to the intermediate electrode 3 through the bump electrode 6 and connected to the electrode 3 by pressing the electrode 7 against the electrode 3 while an ultrasonic wave is emitted.
机译:要解决的问题:为了防止电子元件的破裂,断电等,在电极焊盘上形成中间电极,而在含有这种金属材料的基础电极上形成中间电极,这可能会使中间电极的定向性能变差。中间电极。解决方案:在压电基板1的表面上,即在其上形成梳形电极的表面上,形成了与梳形电极电连接的电极垫2。在焊盘2上,设置有由Al构成的中间电极3,并且在电极3的下方形成有由NiCr构成的基础电极4,该NiCr是可以使电极3的取向性劣化的金属材料。在中间电极3上设置Au成分的一部分,形成在封装容器8上的封装电极7隔着凸点电极6与中间电极3相对,通过将电极7按压在电极上而与电极3连接。发射超声波的同时图3所示。

著录项

  • 公开/公告号JP2001015540A

    专利类型

  • 公开/公告日2001-01-19

    原文格式PDF

  • 申请/专利权人 MURATA MFG CO LTD;

    申请/专利号JP19990284260

  • 发明设计人 TAGA SHIGETO;

    申请日1999-10-05

  • 分类号H01L21/60;H03H3/08;H03H9/145;

  • 国家 JP

  • 入库时间 2022-08-22 01:31:20

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