METHOD FOR CONNECTING WIRING ELECTRODES, MANUFACTURING METHOD AND DEFECT CORRECTING METHOD FOR LIQUID CRYSTAL DISPLAY DEVICE SUBSTRATE, AND METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY DEVICE, AND PROCESSING DEVICE USED THEREFOR

摘要

PROBLEM TO BE SOLVED: To obtain a high quality liquid crystal display device by inspecting wiring electrodes and correcting disconnection defects with high reliability and ease.;SOLUTION: Electric charges are supplied to inspection signal input electrode wiring 11 by a charge beam 21 and cause a dielectric breakdown of an insulating film 2 at an intersectional part of a signal electrode 4 to electrically connect both wiring electrodes. Then, inspections of adjacent short and withstand voltage between signal electrodes 4 are carried out by inputting an inspection signal to the inspection signal input electrode wiring 11, or a preliminary wiring electrode is supplied with electric charges by a charge beam to cause a dielectric break down of the insulating film at the intersectional part of the disconnected signal electrode, to electrically connect both wiring electrodes with each other. Then, the signal is inputted to the preliminary electrode from the input side of the disconnected signal electrode to let the signal detour the periphery of the panel, and is inputted from the non-input side of the disconnected wiring electrode.;COPYRIGHT: (C)2001,JPO