DECOMPOSITION METHOD AND DECOMPOSITION DEVICE FOR ORGANIC MATTER IN WATER

摘要

PROBLEM TO BE SOLVED: To provide a decomposition method and decomposition device for organic matter in water adequately usable for recovering and recycling of the water, such as waste rinsing water, containing the organic matter used in a semiconductor manufacturing stage and a liquid crystal manufacturing stage.;SOLUTION: This decomposition method for the organic matter in the water has a stage for regulating the pH of the water to be treated to 7 to 10, a stage for regulating the cemp. of the water to be treated to ≥35°C, a stage for adding hydrogen peroxide and ozone to the heated water to be treated, a stage for oxidation decomposing the organic matter included in the water to be treated and a stage for decomposing and removing the hydrogen peroxide and ozone remaining in the water to be treated in which the organic matter is oxidation decomposed. The decomposition device for the organic matter in the water has a means for regulating the pH of the water to be treated to 7 to 10, a means for regulating the temperature of the water to be treated to ≥35°C, a means for adding the hydrogen peroxide and the ozone to the heated water to be treated, a means for oxidation decomposing the organic matter included in the water to be treated and a means for decomposing and removing the hydrogen peroxide and ozone remaining in the water to be treated in which the organic matter is oxidation decomposed.;COPYRIGHT: (C)2001,JPO