Uses the electrode and this electrode for glow discharge plasma generation the reactor

摘要

PURPOSE:To provide a reaction device equipped with a glow discharge plasma generating electrode capable of causing a gas, which has not been able to generate glow discharge at a pressure over the atmospheric according to the conventional technique, to generate glow discharge uniformly and stably not only at a high frequency but also at low frequency. CONSTITUTION:An electrode 2 to be installed in a gaseous phase over the atmospheric pressure is made from a wire meshing composed of metal thin wires having diameter between 0.01-0.5mm depending upon the sort of the gas for generating plasma, and a dielectric substance is contacted fast with this wire meshing. Electrodes are installed opposingly in a reaction vessel 1 in its gaseous phade over the atmospheric pressure, and a voltage is impressed between the electrodes from a power supply 8 so that a glow discharge is generated. At least one of the opposing electrodes is formed from the glow discharge plasma generating electrode 2. This type of electrode 2 is fabricated by forming wire meshings 6a, 6b from metal thin wires of diameter depending upon the sort of the plasma generating gas, contacting fast these meshings with conductive plates 5a, 5b, and providing dielectric substance 7a, 7b on the meshings 6a, 6b.