PROBLEM TO BE SOLVED: To obtain an X-ray perspective observation apparatus, in which an angle of observation can be changed while its magnifying factor is fixed, in which the perspective observation direction can be changed to a desired direction, and in which conversely, the magnifying factor can be changed as desired, in a state that the perspective observation direction is fixed, which can obtain a large magnifying factor, which can be miniaturized and which is realized at low cost. ;SOLUTION: The X-ray variable-oblique observation-angle perspective observation apparatus is constituted of a transmission-type X-ray source. The perspective observation apparatus is constituted of an X-Y stage, with which an object to be measured is positioned in the horizontal direction in the lower part of the X-ray source. The perspective observation apparatus is constituted of an imaging-part rectilinear movement stage, on which the X-Y stage is positioned in the vertical direction as a magnification direction, by which an X-ray imaging part is moved rectilinearly to the lower part of the X-Y stage and by which imaging part is moved rectilinearly in the horizontal direction. The perspective observation apparatus is constituted of an imaging-part tilt mechanism, by which an X-ray detection face is always directed to an X-ray radiation port, when the rectlinear movement stage is operated. The perspective observation apparatus is constituted of an imaging part rotating mechanism which turns the imaging part.;COPYRIGHT: (C)2001,JPO
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