RADIATION-SENSITIVE RESIN COMPOSITION FOR PRODUCING INORGANIC FORMED ARTICLE, INORGANIC FORMED ARTICLE, AND PRODUCTION METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition which is used for producing an inorganic formed article, can form a fine pattern uniformly in a good shape, exhibits a very small shrinkage in a coating film section when the inorganic formed article is produced, and enables the positioning of viaholes in laminating ceramics green sheets to be accurately carried out.;SOLUTION: This resin composition contains (A) a polymer which has aciddissociable functional groups dissociable by an acid to form acidic functional groups, (B) a component which generates an acid when exposed to a radiation, and (C) an inorganic powder. The resin composition is applied to a carrier, dried, irradiated with a radiation in a certain pattern, heated, developed to be formed, and baked to give the objective inorganic molded item.;COPYRIGHT: (C)2001,JPO