COPPER CHLORIDE ETCHING SOLUTION ELECTROLYTIC REGENERATION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an improvement type electrolytic regeneration treatment system by which the precipitating state of copper powder is fixed, and the scraping-off of the copper powder from a cathode plate and the exhaust of the copper powder from a cathode chamber can stably be executed. ;SOLUTION: A solution return path from an electrolytic cell 2 to an etching cell 1 is arranged with a return solution cell 4, a solution exhausted from an anode chamber is temporarily retained in the return solution cell, moreover, a cathode chamber 23 of the electrolytic cell is provided with a solution face level detecting means 16, based on the detected result from the solution face level detecting means, a part of the solution retained in the return solution cell is returned to the cathode chamber, and the solution face level of the cathode chamber is controlled to a fixed range.;COPYRIGHT: (C)2001,JPO