DEVICE AND METHOD FOR COMPARATIVELY VERIFYING PATTERN AND MEDIUM WITH RECORDED COMPARATIVE PATTERN VERIFICATION PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a comparative pattern verifying device capable of shortening a time required for comparatively verifying a pattern while using the bit map of gray level. ;SOLUTION: This comparative pattern verifying device is provided with a basic graphic dividing part 23 for dividing design pattern data into basic graphics, a basic graphic comparing part 24 for comparing the basic graphic of the design pattern data divided by the basic graphic dividing part 23 with pattern data for electronic beam plotter, a gray level bit map preparing part 28 for preparing the gray level bit map of the basic graphics of the design pattern data and the pattern data for electronic beam plotter, which are decided as non-coincident by the basic graphic comparing part 24, and bit map comparing part 31 for comparing the gray level bit map of the basic graphics of the design pattern data with the gray level bit map of the pattern data for electronic beam plotter.;COPYRIGHT: (C)2001,JPO