FLUID TRANSFERRING PIPING DEVICE AND FLUID SUPPLY DEVICE WHICH FACILITATE PURGING OF RESIDUAL MATERIAL, PURGING METHOD FOR RESIDUAL MATERIAL IN PIPING DEVICE, AND FLUID SUPPLY METHOD

摘要

PROBLEM TO BE SOLVED: To provide a piping device and fluid supply device which can easily purge residual material and used suitably for supplying semiconductor material fluid, purging method for the residual material in the piping device and fluid supply method. ;SOLUTION: A three-port valve is adopted to a valve used in the vicinity of a joint connecting a vessel to piping. Communication of the two ports is kept even when the valve is closed. It is thus possible to make purging fluid pass through a dead space which is inevitably generated in a conventional piping structure, and easily eliminate residual material in the piping device. As a result, it is possible to provide a new piping device and a fluid supply device showing high efficiency in purging, and purging method for the residual material using the same and fluid supply method.;COPYRIGHT: (C)2001,JPO