METHOD AND APPARATUS FOR ANALYZING ELEMENT DISTRIBUTION IN DEPTH DIRECTION USING PRECISE CROSS-SECTIONAL PROCESSING CONVERGED ION BEAM

摘要

PROBLEM TO BE SOLVED: To solve such a problem that there is the point at issue such that the depth direction resolving power lowers in dependence on analyzing depth in a conventional depth direction analyzing method and, since a sputtering yield is changed when an uneven surface or a fine particle surface is set as an analytical object, accurate depth direction analysis is difficult and the depth direction resolving power lowers by the effect of knock-on mixing or sputtering re-adhesion and, since an extremely wide analyzing region of about several hundred μm2 is required at the lowest in analysis, it is difficult to use the conventional depth direction analyzing method as an element distribution analyzing method in an extremely fine region.;SOLUTION: The method for analyzing the depth direction element distribution of a sample consists of a process subjecting the surface of a sample to precise cross-sectional processing by converged ion beam 2', a process for measuring fine particles 3 generated from the cross section 17 obtained by the precise cross-sectional processing and a process for processing the measured value as a function of the depth direction scanning position of the converged ion beam.;COPYRIGHT: (C)2001,JPO