RESTRICTION PERMEATING MEMBRANE AND FORMATION OF THE RESTRICTION PERMEATING MEMBRANE, AND CHEMICAL SENSOR AND MANUFACTURE OF THE CHEMICAL SENSOR

摘要

PROBLEM TO BE SOLVED: To correctly measure target measure object within a concentration range by forming a through-hole to a functional membrane, and setting an open area of an upper face part to be larger than the open area of a bottom face part of the hole. ;SOLUTION: A restriction permeating membrane 1 is formed to an outer layer of a functional membrane 2, with holes 4 formed penetrating the functional membrane 2. Permeation of a substance to be measured to the functional membrane 2 is limited. That is, since the holes 4 are formed to the restriction permeating membrane 1, a quantity of the substance to be measured which reaches the functional membrane 2 is limited by the restriction permeating membrane. Since measurement to higher concentrations is made possible, the measurable concentration range of the substance to be measured can be widened. If the restriction permeating membrane 1 becomes 2 μm thick or larger, it takes longer time for the substance to reach the functional membrane 2 via the holes 4 from outside the restriction permeation membrane 1, and a measurement time is increased. However, since the restriction permeating membrane 1 is made 0.05-2 μm thick, the concentration can be measured correctly in a short time.;COPYRIGHT: (C)2001,JPO