THIN FILM PHASE PLATE FOR PHASE DIFFERENCE ELECTRON MICROSCOPE, THE PHASE DIFFERENCE ELECTRON MICROSCOPE, AND AN ANTISTATIC METHOD FOR THE PHASE PLATE

摘要

PROBLEM TO BE SOLVED: To control electrification of a thin film phase plate, minimize the influence even when it is electrified, enhance the contrast in electron microscope image, and remove the distortion of an image. ;SOLUTION: As a phase difference electron microscope supported by the electron microscope objective iris diaphragm 1 for uniformly shifting the phase of an incident and a scattered electron waves, it consists of a thin film 2 of a composite body of conductive amorphous substances containing amorphous carbon and amorphous gold, or the conductive amorphous substances in question, having a minute truely round electron beam transmission hole 3 with a size of 0.05 to 5 μm in diameter at the opening center of the objective iris diaphragm 1, or amorphous substance of a truely round circle with size of 0.05 to 5 μm in diameter which delays the phase of an electron wave by π is deposited on the opening of an objective iris diaphragm. A thin film phase plate is arranged so that it is placed at the rear focal plane of the lens or behind it, and in order to prevent electrification, it is irradiated with an electron beam in a large quantity prior to the use of the microscope.;COPYRIGHT: (C)2001,JPO