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The information processing apparatus and a scanning tunneling electron microscope

机译:信息处理设备和扫描隧道电子显微镜

摘要

PURPOSE: To achieve a means for inhibiting a crosstalk between a signal for controlling a cantilever and a probe detection signal and for obtaining a stable position control, a detection signal with an improved S/N ratio, etc. ;CONSTITUTION: An information processing device is at least provided with a means for bringing a probe 1 and a medium 3 closer, a means for detecting a fine signal which is obtained from a physical phenomenon which is generated between the probe and the medium, and a fine-move mechanism 2 for controlling the position of the probe. Also, it is provided with a switch mechanism 10 which separates a drive signal which is applied to the fine-move mechanism temporarily.;COPYRIGHT: (C)1993,JPO&Japio
机译:目的:实现一种手段,以抑制控制悬臂的信号和探针检测信号之间的串扰,并获得稳定的位置控制,具有改善的信噪比的检测信号等;组成:一种信息处理设备至少设置有用于使探针1和介质3靠近的装置,用于检测由探针和介质之间产生的物理现象获得的精细信号的装置,以及用于移动的精细移动机构2。控制探头的位置。另外,它还设有一个开关机构10,该开关机构10将暂时施加到微动机构上的驱动信号分离开。COPYRIGHT:(C)1993,JPO&Japio

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