PRODUCTION DEVICE OF HIGH PURITY OF WATER AND PRODUCTION METHOD OF HIGH PURITY OF WATER

摘要

PROBLEM TO BE SOLVED: To produce high purity of water having much higher purity and being stable in water quality for a long period. ;SOLUTION: When raw water is successively passed through an RO membrane device 1, a first stage electric deionizing device 2 and a second stage electric deionizing device 3 to treat water, a decarboxylation device 4 is provided in the front stage of the RO membrane device 1; alkali is added to feeding water of the first stage electric deionizing device 2; or an anion exchange resin tower 5 is provided between the first stage electric deionizing device 2 and the second stage electric deionizing device 3.;COPYRIGHT: (C)2001,JPO