WATER QUALITY EVALUATING METHOD AND CONTAINER FOR HOLDING SUBSTRATE FOR EVALUATING WATER QUALITY

摘要

PROBLEM TO BE SOLVED: To simultaneously clean a plurality of substrates with ultrapure water and to evaluate the quality of the ultrapure water more in detail than in the case of cleaning the plurality of substrates one by one. SOLUTION: Two substrates or more are brought into contact with water, and the surfaces of the substrates are dissolved by a dissolving liquid one by one. The dissolving liquid is recovered, and the amount of impurities in the recovered dissolving liquid is detected to evaluate the quality of the water which has been in contact with the substrates.