MONITORING METHOD FOR BEAM PROFILE AND MULTI-WIRE BEAM PROFILE MONITOR

摘要

PROBLEM TO BE SOLVED: To provide a multi-wire beam profile monitor capable of precisely monitoring the beam current without being affected by the unstable electrostatic capacity of the capacitor for storing the beam current.;SOLUTION: The electrostatic capacity of the capacitor C1 is obtained from the voltage measured by the cycles, one of which is a pre-charge measuring cycle to measure the capacitor terminal voltage when the discharge is done for the prescribed time after the capacitor C1 provided for the wire electrode Wi is charged up to the prescribed voltage, and the other one of which is an electrostatic capacity measuring cycle to measure the capacitor terminal voltage when discharge is done for the prescribed time after the capacitor C1 is charged up with the prescribed current. The beam profile is monitored without receiving the influence of the unstable electrostatic capacity of the capacitor, by utilizing the arithmetic operation of the beam current caught by means of the electrostatic capacity.;COPYRIGHT: (C)2001,JPO