ORIENTATIONAL SINGLE LAYER FERROELECTRIC OXIDE THIN FILM, METHOD FOR PRODUCING THE SAME AND SWITCHING ELEMENT USING THE THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide an orientational single layer ferroelectric oxide thin film which has a smooth surface and is useful for making a high quality switching element, to provide a method for profitably produce the same, and to provide a high quality switching element obtained by laminating a conductive thin film to the ferroelectric oxide thin film having the smooth surface. ;SOLUTION: This orientational single layer ferroelectric oxide thin film is obtained by forming a ferroelectric oxide thin film having a smooth surface on a single crystal substrate. The method for producing the thin film comprises coating a coating liquid for forming the ferroelectric oxide thin film on the single crystal substrate, drying the coated liquid, and then calcining the product, and further repeating the these processes several times to accumulate a ferroelectric oxide calcination thin film having a prescribed film thickness, and subsequently crystallizing the calcined thin film.;COPYRIGHT: (C)2001,JPO