APPARATUS FOR CONFIRMING PRESENCE AND NORMAL POSITION OF SUBSTRATE OR SUBSTRATE BASE AND CONFIRMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for confirming the presence and a normal position of a substrate or a substrate base and a confirming method, whereby confirmation its presence is made, if the substrate or the substrate base is stored on a storage step of a storage case and confirmation of normal position is made, if the substrate or the substrate base is at a normal position.;SOLUTION: The apparatus is provided for confirming the presence and a normal position of the substrate or the substrate base, that are stored in the storage case having a transfer mechanism, shifting perpendicularly with respect to the surface of the stored substrate or substrate base. At least a single sensor is provided for measuring a distance from the substrate or the substrate base 2, by using light diagonally or at an equal surface position with respect to a surface of the substrate or the substrate base 2 in an opening direction of the storage case 1. When the storage case 1 is shifted by a shifting mechanism, the sensor measures the distance between the sensor and the end or the periphery of the substrate or the substrate base 2 that are stored in the storage case 1. Then, the presence and normal position of the substrate or the substrate base are confirmed, based on the distance information and the shifting distance information of the storage case.;COPYRIGHT: (C)2001,JPO