DETECTING ELEMENT FOR DETECTOR OF GAS IONIZING AND CHARGE MULTIPLYING RADIATION, ITS MANUFACTURE, MANUFACTURE OF DETECTOR, AND RADIATION DETECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To set a detecting face into an optional shape so as to improve positional accuracy for detecting radiation by forming two electrode wires in parallel with each other and adjoingly on a dielectric flexible film. ;SOLUTION: For example, copper foil to be electrode are laminated on both faces of a polyimide film 5 to form electric conductive layers 13. Photolithograph technique is used against the copper foil, respective electrodes 6, 7, and 8 are formed by patterning, and hence detecting elements are obtained. Because the detecting part and the circuit part of the detecting element can be approached to each other, mixing-in of noise or the like can be reduced, and it is favorable for processing the detected signal. In the case of piping or the like having roundness, distance from the surface of an object can be reduced and influence of radiation attenuation between radiation emitting face and the detecting element can be reduced, an energy value and a radiation generated position can be accurately detected.;COPYRIGHT: (C)2000,JPO