METHOD AND APPARATUS FOR OBSERVING DISTRIBUTION OF RECOMBINATION CENTERS IN SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To provide a method and apparatus capable of observing the distribution of the recombination centers contained in a semiconductor. ;SOLUTION: The distribution of the recombination centers in a semiconductor is observed by measuring the electrical detection magnetic resonance of the semiconductor while controlling a magnetic field spatially and analyzing the signal obtained by this measurement. An apparatus for observing the distribution of the recombination centers in a semiconductor is equipped with a detection means of an electrical detection magnetic resonance signal and a spatial magnetic field control means.;COPYRIGHT: (C)2001,JPO