LASER PROCESSING DEVICE, LASER PROCESSING METHOD, LASER BEAM DISTRIBUTION OBSERVING APPARATUS AND LASER BEAM DISTRIBUTION OBSERVING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a laser processing device, a laser processing method, a laser beam distribution observing apparatus and a laser beam distribution observing method capable of observing a distribution of laser beams induced by a liquid jet.;SOLUTION: A laser beam distribution observing apparatus 26 includes: a shield plate 52 which is placed at a height relatively equal to a work-piece W (an object to be processed) with respect to a processing head 40, shields a liquid jet J and transmits a laser beam L induced by the liquid jet J; an imaging lens 56 which images the laser beam L transmitted by the shield plate 52; a photo-detector 58 which is placed on a conjugated position relation with the shield plate 52 with respect to the imaging lens 56 and receives the laser beam L imaged by the imaging lens 56; a signal processing unit 62 which acquires laser beam distribution image data exhibiting a distribution of the laser beam L on a contact surface of the liquid jet L with the shield plate 52 on the basis of an output signal outputted from the photo-detector 58; and a monitor 64 which displays laser beam distribution image data acquired by the signal processing unit 62.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2017,JPO&INPIT