MODULE FOR REFLECTION TYPE LIQUID CRYSTAL DISPLAY DEVICES, ITS MANUFACTURING METHOD, AND REFLECTION TYPE LIQUID CRYSTAL DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a reflection type liquid crystal display device satisfactory in display quality by embedding space between reflectors with insulating material, and planarizing the surface of a semiconductor chip module.;SOLUTION: A reflector 21 is formed, after forming a MOS transistor, insulation films 14, 15, 18 and 19, and connecting plugs 16a and 20a on a silicon substrate 11 and performing CMP polishing of the surface of the insulation film 19. Then, an SiN film is formed as a cover film 22 on the reflector 21. Next, on the cover film 22, SOG is applied and the space between the reflectors 21 is embedded by the SOG film 23. Next, the CMP polishing of the SOG film 23 is performed by using the cover film 23 as a stopper, and the surface is planarized.;COPYRIGHT: (C)2001,JPO