Module for reflection type liquid crystal display device, method of manufacturing the same, and reflection type liquid crystal display device

摘要

A MOS transistor, an insulating film and a connecting plug are formed on a silicon substrate, and a surface of the insulating film undergoes a CMP polishing, followed by formation of reflectors. Thereafter, a SiN film is formed as a cover film on the reflectors. Next, SOG is coated onto the cover film, and gaps between the reflectors are buried by the SOG. Subsequently, an SOG film undergoes a CMP polishing using the cover film as a stopper, and a surface thereof is flattened.