HIGH-DENSITY PLASMA REACTION APPARATUS AND HIGH-DENSITY PLASMA REACTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a high-density plasma reaction apparatus and a high-density plasma reaction method capable of improving throughput and reducing a gas cost. ;SOLUTION: The high-density plasma reaction apparatus 100 has a rotary electrode 1, a high-frequency power source 7 for impressing a high-frequency voltage to the rotary electrode 1 and a stage 9 for scanning a substrate 2 in a direction parallel to the rotary electrode 1 and further has a reaction gas introducing section 3a disposed on the upstream side of the rotary electrode 1 and a reaction gas discharge section 4a disposed on the downstream side of the rotary electrode 1. The reaction gas introducing section 3a has a reaction gas introducing port 3 which is formed near the rotary electrode 1 and introduces the reaction gas. The reaction gas discharge section 4a has a reaction gas discharge port 4 which is formed near the rotary electrode 1 and discharges the reaction gas after plasma reaction.;COPYRIGHT: (C)2001,JPO