NEAR-FIELD OPTICAL MICROSCOPE AND PROBLE FOR IT

摘要

PROBLEM TO BE SOLVED: To provide an SNOM(scanning-type near-field optical microscope) that can be operated in air for obtaining a high-resolution SNOM image where the influence of scattered light from an area other than the tip of a probe has been eliminated as much as possible. ;SOLUTION: Slide glass 2 where a sample 1 is placed is arranged on an internal total reflection prism 3 through matching oil 4. A laser beam is applied to the sample 1 through the prism 3, and a proximity field is generated on the sample surface. A probe 106 that is supported by the free end of a cantilever 101 is arranged at the upper portion of the sample 1, and an objective lens 19 is arranged at the upper portion. The objective lens 19 is arranged and a scattered light detection mirror cylinder 222 is arranged at the upper portion of the objective lens 19, thus composing a scattered light detection optical system for detecting scattered light being generated due to the entry of the probe 106 into the near field. The probe 106 is in a tetrapod shape and has an extension part 107 being extended in one direction. The thickness of the extension part 107 is the maximum over length from the tip to the wavelength or more of incident light and is within three times larger or less of the tip diameter.;COPYRIGHT: (C)2001,JPO