VACUUM FLANGE USED IN INFRARED RAY RADIATION HEATING DEVICE AND INFRARED RADIATION HEATING DEVICE PROVIDED WITH THIS VACUUM FLANGE

摘要

PROBLEM TO BE SOLVED: To provide a vacuum flange used in an infrared ray radiation heating device and an infrared ray radiation heating device having this flange installed therein in which the temperature of the vacuum flange can be prevented from being increased with dispersed infrared ray and a heated item can be efficiently heated.;SOLUTION: There is provided an infrared ray radiation and heating device having an infrared ray generating section 3 having an infrared ray lamp, a transparent quartz disk window 5, and a vacuum chamber 6, wherein infrared ray generated from the infrared ray lamp passes through the transparent quartz disk window 5 so as to radiate the infrared ray against the heated item mounted in a vacuum chamber 6 kept in vacuum or various kinds of gas atmosphere. The device is constituted such that a donut-shaped member is placed between the infrared ray generating section 3 and the vacuum chamber 6 so as to hold the transparent quartz disk window 5, a flow-inlet port 13A is arranged at the outside part of it, a flow passage 13 where cooling medium such as cooling water or the like is formed within a barrel, the cooling medium such as cooling water flowing from the flow-inlet port 13A approximately circulates in the flow passage 13 and the cooling medium flows out to a flow outlet port 13B.;COPYRIGHT: (C)2000,JPO