THREE-DIMENSIONAL MEASUREMENT DEVICE AND SOLID-STATE IMAGE SENSING ELEMENT USED FOR IT

摘要

PROBLEM TO BE SOLVED: To measure a three-dimensional shape at a high speed by arranging a plurality of picture elements two-dimensionally, forming each picture element long in a scanning direction on an image sensing surface of measurement light and arranging picture element adjacent in a direction perpendicular to a scanning direction shifted in scanning direction. ;SOLUTION: A plurality of picture elements 22 are arranged two- dimensionally, each picture element 22 has a long shape in a direction (a) on an image sensing surface of light receiving slit light LR thereof and picture elements 22 adjacent in a direction perpendicular to the scanning direction (a) are arranged shifted in a scanning direction. As for the shape of the unit picture element 22, the ratio of a length (x) in a scanning direction of the slit light LR and a width (y) across it is made at least 1:1.4. That is, the unit picture element 22 is formed in a rectangle whose area is made the same by doubling the length (x) in a scanning direction of the slit light LR and cutting the width (y) by half. Thereby, a three-dimensional shape can be measured at a high speed.;COPYRIGHT: (C)2001,JPO