INORGANIC COMPOUND THIN FILM AND METHOD FOR DEPOSITION OF INORGANIC COMPOUND THIN FILM, DISK-SHAPED SUBSTRATE, MAGNETIC RECORDING MEDIUM, PRODUCTION OF MAGNETIC RECORDING MEDIUM AND MAGNETIC DISK DEVICE

摘要

PROBLEM TO BE SOLVED: To form desired ruggedness on a disk substrate, to lessen the generation of noise by suppressing the dispersion of crystal particle sizes in a magnetic film, lessening the generation of noise by pulverization and reducing these sizes, to obtain low noise, low thermal fluctuation and low thermal degaussing by suppressing the dispersion of the crystal particle sizes, to facilitate the formation of micromagnetic domains and to allow these magnetic domains to stably exist by controlling the orientability of the magnetic film and to obtain an ultra-high density magnetic recording medium in excess of 40 GB/inch2.;SOLUTION: This inorganic compound thin film is composed of the crystalline particles and the amorphous materials enclosing the same. The crystalline particles are regular hexagonal, a two-dimensionally regularly arrayed and have a honeycomb structure. The distance from the projecting parts on the surface of the inorganic compound this film 2 to the parallel direction up to the projecting parts nearest these projecting parts and the distance in a perpendicular direction from the projecting parts on the surface of the inorganic compound thin film 2 to the recessed parts nearest these projecting parts are specified ≤20 nm in the surface smoothness of the inorganic compound thin film 2.;COPYRIGHT: (C)2000,JPO