DISPLAY SYSTEM OF OPTIMUM CONTROL ANALYSIS VALUE OF SPECIFIC AREA ENVIRONMENT INSIDE CLEAN ROOM OR CLEAN BOOTH

摘要

PROBLEM TO BE SOLVED: To provide the display system of the optimum control analysis value of a specific area environment in a clean room or a clean booth which is capable of re-simulating air conditioner equipment. SOLUTION: An optimum control analysis value displaying system 1 is provided with a dust counter 2, an air flow measuring unit 7, a thermometer 3, a hygrometer 4, a barometer 5 and a gas sensor 6 at predetermined positions, of which measured value monitoring unit 8 memorizes and displays the measured value, inputs the environmental constituent factors of such as the positions of air supply and exhaust openings and the capacity of an air conditioner arranged inside the clean room or the clean booth, the capacity of the air conditioner as the number of units and power consumption, the position, the size and form, the quality of materials, the number of workers and the working positions of a manufacturing line, and based on the input value, displays in simulation the particle density distribution, the airflow and the temperature inside the clean room of the clean booth on a calculating and displaying unit 9.