Process for the preparation of thicker films of silicon or silicon based according to the technique of sun gel, and thick films thus obtained

摘要

Invention Patent: B "PROCESS FOR THE PREPARATION OF VACCINE FILMS SPECIAL FOR SYLICA OR SYLICA BASE, CONFORME T O SOL-GEL TECHNICAL, AND ASSOCIATED SPECIES FILMS" D . The present invention describes a sun gel process, which allows preparation on a substrate of vitreous films of silicon oxide or mixed oxides based on silicon oxide, of thickness above 1 micrometer, usually between 2 and 20 micrometers and characterised by the absence of defects, which makes the said substrate particularly suitable as a waveguide in flat optical devices.