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Loaded particle-emitting node, charged particle emitter, welding device, charged particle beam node and fast charged particle node
Loaded particle-emitting node, charged particle emitter, welding device, charged particle beam node and fast charged particle node
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机译:负载粒子发射节点,带电粒子发射器,焊接设备,带电粒子束节点和快速带电粒子节点
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摘要
A charged particle beam column assembly for mounting to an evacuated charged particle beam source chamber. The assembly has a sequence of controlled pressure chambers (55-57), each having inlet and outlet apertures (51A-54A) through which a charged particle beam can pass and an evacuation port (59) for connection to a pump to enable the pressure in the chamber to be controlled. The pressure in successive chambers (55-57) increases in use. An evacuation port (59) is connected to a downstream chamber via a conduit (145,146) which extends within the assembly past at least one upstream chamber. IMAGE
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