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PHOTO INDUCED DISCHARGE CHARACTERISTICS (PIDC) CONTROLLER

机译:光电感应放电特性(PIDC)控制器

摘要

An apparatus for monitoring and controlling electrical parameter of animaging surface, the monitoring controlling apparatus including a patch generator forrecording a first control patch at a first voltage level and a second control patch at asecond voltage level on the imaging surface; electrostatic voltmeter for measuringvoltage potentials associated with said first control patch and second control patch. Aprocessor, in communication with said patch generator, calculates the electricalparameters of the imaging surface from the measured voltage potentials from said firstand second control patches. The processor determines a deviation between thecalculated electrical parameters values and setup values. Then, the processorproduces and sends a feedback error signal to said patch generator if said deviationexceed a threshold level. The patch generator records a third control patch at a thirdvoltage level on the imaging surface upon reception of said error signal The ESVsenses said third control patch. The processor calculates the electrical parameters ofthe imaging surface from the measured voltage potential of the third control patch anddetermines a correction factor. The charging device, exposure system and developerare adjusted in accordance to said correction factor
机译:一种用于监测和控制电气参数的装置成像表面,监视控制设备包括用于在第一电压电平下记录第一控制补丁,在第二电压下记录第二控制补丁成像表面上的第二电压电平;静电电压表与所述第一控制贴片和第二控制贴片相关联的电势。一种与所述斑块发生器通信的处理器,根据来自所述第一处理器的测得的电势来计算成像表面的电参数。和第二个控制补丁。处理器确定计算的电气参数值和设置值。然后,处理器如果所述偏差产生并发送反馈错误信号到所述补丁生成器超过阈值水平。补丁生成器在第三个控件记录第三个控制补丁当接收到所述误差信号ESV时,成像表面上的电压电平ESV感测所述第三控制补丁。处理器计算出测得的第三控制面片的电势和成像面确定校正因子。充电装置,曝光系统和显影剂根据所述校正因子进行调整

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