Transition metal carbide films for applications in ink jet printheads

摘要

A thermal ink jet printhead that includes a thin film substrate (11) including a plurality of thin film layers, a plurality of ink firing heater resistors (56) defined in the plurality of thin film layers, a patterned tantalum carbide layer (63) disposed on the plurality of thin film layers, an ink barrier layer (12) disposed over the tantalum carbide layer, and respective ink chambers (19) formed in the ink barrier layer over respective thin film resistors, each chamber formed by a chamber opening in barrier layer. The tantalum carbide layer forms an oxidation and wear resistance layer and/or a barrier adhesion layer.