EQUIPMENT FOR CONVEYING WAFER BETWEEN SPINNER AND STEPPER AND CONVEYING METHOD USING CONVEYING EQUIPMENT

摘要

PURPOSE: An equipment for conveying a wafer between a spinner and a stepper and a conveying method using the equipment are provided to minimize an error occurred when conveying the wafer between the spinner and the stepper, and a mounting space. CONSTITUTION: The device comprises a spinner body(40); a spinner interface(42) disposed in the spinner body to have a port(48,50) and an interface wafer stage(52); a stepper body(44) having the first dipod(56); and a wafer transfer system(46) disposed in the stepper body to have the second dipod(58) and a pedestal(54). In the equipment, the port is comprised of the first and second dipod to be also served as a buffer. A method of conveying the wafer using the equipment comprises the steps of: conveying the wafer from the spinner body through the spinner interface to the pedestal of the wafer transfer system; conveying the wafer from the pedestal to the second dipod; conveying the wafer from the second dipod to the first dipod; conveying the wafer from the first dipod through the wafer transfer system to the interface wafer stage of the spinner interface; and conveying the wafer from the interface wafer stage to the spinner body.