DUPLEX ZONE SHOWER HEAD AND CHEMICALLY ENHANCED CHEMICAL VAPOR DEPOSITION DEVICE USING THE ZONE SHOWER

摘要

PURPOSE: A duplex zone shower head and a chemically enhanced chemical vapor deposition device using the zone shower are provided to improve characteristics of adhesion, vapor deposition speed, texture, and step coverage of metal thin film. CONSTITUTION: The duplex zone shower head includes the first shower zone(311) and the second shower zone(321). The first shower zone receives a vapor source material by way of a vapor source material inlet line and contains the material to inject the material through vapor source material injection nozzle. The second shower zone receives and contains a chemical adding agent by way of a chemical inject line and injects the adding agent to a reaction chamber through a chemical injection nozzle. The first shower zone and the second shower zone are formed to be separated. The injection nozzle of the second shower zone further is made of SUS, Ni, Al2O3 material and has a cylindrical formation whose diameter is between 0.1 and 5 millimeters.