PURPOSE: A measurement method of a transient phenomenon of a high speed digital signal is provided to measure variations of pulse signals under dozens of pico seconds in a very short time range by using an S parameter for stably measuring high frequency components. CONSTITUTION: The method comprises the steps of making test patterns, measuring an S parameter of a DUT(Device Under Test) from a low frequency to a high frequency by using a vector network analyzer, measuring an S parameter of an open pad also from a low frequency to a high frequency, calculating the S parameter by eliminating a parasitic effect for obtaining the S parameter of pure signal lines, obtaining a characteristic impedance and an electric wave constant of a transmission line on each measurement frequency, expressing mathematically an input function in a frequency domain, expressing a system function in a frequency domain by using the characteristic impedance and the electric wave constant, calculating the system response function in a frequency domain and converting the calculated result in a time domain.
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