- X-RAY SPECTROSCOPIC ANALYZER HAVING SAMPLE SURFACE OBSERVATION MECHANISM

摘要

PURPOSE: To provide an X-ray analyzer capable of clearly observing the shape of the contaminated region, dropping mark or the like on the surface of a sample under a dark field in such a state that the sample is set to the X-ray analyzer. CONSTITUTION: In the X-ray analyzer l for irradiating the sample 3 with X-rays 4 in a chamber 2 to perform the analysis of the sample 3, a visual confirmation device 11 for visually confirming the sample 3 and an illumination means 31 for allowing illumination light B to be obliquely incident on the surface of the sample to illuminate the surface of the sample 3 while suppressing the incidence of the reflected light of the illumination light B on the visual confirmation device 11 are provided. By this constitution, the shape of the contaminated region, dropping mark or the like on the surface of the sample 3 can be clearly observed by the visual confirmation device 11 while the sample 3 is set to the X-ray analyzer 1.